Kikuo Douta is an author at Hitachi (Japan) specializing in engineering, biomedical engineering, and microfabrication.
Top concepts
DermatologyEngineeringPhotochemistryMaterial ScienceMicrofabricationOptical PropertiesBiomedical Engineering
Publications per year
1981–1981
1
1
Azide-phenolic resin photoresists for deep UV lithography
Takao Iwayanagi, T. Kohashi, Saburo Nonogaki et al. · IEEE Transactions on Electron Devices · 1981 · 55 citations
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