Statistics
Publications
1
Citations
15
H-Index
1
Active since
2007
Affiliations
Gregory Debeaux is an author at Center for Nanoscale Science and Technology specializing in energy efficiency, microelectronics, and engineering.
Publications per year
2007–2007
1
1
EUV Resist Outgassing: How Much is Too Much?
Kim Dean, Gregory Debeaux, Andrea Wüest et al. · Journal of Photopolymer Science and Technology · 2007 · 15 citations · Full text
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