Phil Matz

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Active since

2004

Affiliations

Texas Instruments (United States)(Current)

Phil Matz is an author at Texas Instruments (United States) specializing in supercritical fluids, dielectric permittivity, and surface hydrophobicity.

Publications per year

2004–2005

Publications

Rapid repair of plasma ash damage in low-<i>k</i> dielectrics using supercritical CO2

Brian P. Gorman, R.A. Orozco-Terán, Zhengya ZHANG et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +17

Supercritical CO<sub>2</sub> Applications in BEOL Cleaning

Phil Matz, R.F. Reidy · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2005 · 30 citations

Engineering, Chemical Engineering, Water Treatment +4

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