Concepedia

Zhengya ZHANG

ZZ

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Publications

1

Citations

51

H-Index

1

Active since

2004

Affiliations

University of North Texas(Current)

Zhengya ZHANG is an author at University of North Texas specializing in materials characterization, surface science, and applied physics.

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Publications per year

2004–2004

1

Publications

1

Rapid repair of plasma ash damage in low-<i>k</i> dielectrics using supercritical CO2

Brian P. Gorman, R.A. Orozco-Terán, Zhengya ZHANG et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 51 citations

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