Statistics
Publications
3
Citations
88
H-Index
3
Active since
1990
Affiliations
Panasonic (Japan)(Current)
Yoshiyuki Tani is an author at Panasonic (Japan) specializing in engineering, surface modification, and polymer science.
Publications per year
1990–2002
3
3
Yoshiyuki Tani, Masaru Sasago · Kobunshi · 1990 · 50 citations · Full text
Excimer Laser Lithography, Advanced Laser Processing, Engineering +6
KrF excimer laser lithography technology for 64M DRAM.
Masayuki Endo, Yoshiyuki Tani, T. Yabu et al. · Journal of Photopolymer Science and Technology · 1991 · 10 citations · Full text
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