Concepedia

Lewis A. Binns

LA

Statistics

Publications

2

Citations

31

H-Index

2

Active since

2006

Affiliations

Accenture (United Kingdom)(Current)

Lewis A. Binns is an author at Accenture (United Kingdom) specializing in overlay metrology, overlay control, and engineering.

Publications per year

2006–2007

2

Publications

2

Multi-layer overlay metrology

Christopher P. Ausschnitt, J. Morningstar, William A. Muth et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 18 citations

, , +11

Blossom overlay metrology implementation

Christopher P. Ausschnitt, W. H. Chu, D. Kolor et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 13 citations

, , +12

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