Concepedia

Hans-Dirk Löwe

HL

Statistics

Publications

3

Citations

332

H-Index

3

Active since

1991

Affiliations

Tohoku University(Current)

Hans-Dirk Löwe is an author at Tohoku University specializing in natural sciences, physics, and electrical engineering.

Publications per year

1991–1993

3

Publications

3

Dual excitation reactive ion etcher for low energy plasma processing

H. Gotô, Hans-Dirk Löwe, Tadahiro Ohmi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 197 citations

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Independent control of ion density and ion bombardment energy in a dual RF excitation plasma

H. Gotô, Hans-Dirk Löwe, T. Ohmi · IEEE Transactions on Semiconductor Manufacturing · 1993 · 98 citations · Full text

, , +15

Control of ion energy and flux in a dual radio frequency excitation magnetron sputtering discharge

Hans-Dirk Löwe, H. Gotô, Tadahiro Ohmi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 37 citations

, , +15

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