Yuko Hanaoka

Resistivity Increase in Ultrafine-Line Copper Conductor for ULSIs

K. Hinode, Yuko Hanaoka, Ken’ichi Takeda et al. · Japanese Journal of Applied Physics · 2001 · 65 citations

Engineering, Line Width, Line Resistivity +17

Increase in Electrical Resistivity of Copper and Aluminum Fine Lines

Yuko Hanaoka, K. Hinode, Ken rsquo ichi Takeda et al. · MATERIALS TRANSACTIONS · 2002 · 60 citations · Full text

A GeSbTe phase-change memory cell featuring a tungsten heater electrode for low-power, highly stable, and short-read-cycle operations

N. Takaura, Motoyasu Terao, Kenzo Kurotsuchi et al. · 2004 · 33 citations

Electrical Engineering, Engineering, Nanoelectronics +13

Fabricating 3D integrated CMOS devices by using wafer stacking and via-last TSV technologies

Mayu Aoki, F. Furuta, Kazuyuki Hozawa et al. · 2013 · 31 citations

Engineering, Device Integration, Integrated Circuits +22

Above-IC integration of capacitive pressure sensor fabricated with CMOS interconnect processes

T. Fujimori, Yuko Hanaoka, Hiroshi Fukuda · 2007 · 10 citations

Engineering, Cmos Lsi, Effective Chip Size +18