Concepedia

Author

Harvey I. Liu

Palo Alto Research Center

Also Known As

Harvey I. Liu

2

Publications

95

Citations

2

H-Index

9

Concepts

All Affiliations

Palo Alto Research Center
HI

About

Harvey I. Liu is an author at Palo Alto Research Center specializing in engineering, nanotechnology, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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93

2

Applied Physics

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93

3

Chemical Engineering

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93

4

Materials Science

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93

5

Microelectronics

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93

Harvey I. Liu

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1

Publications

93

Citations

1

H-Index

YearCitations

Oxidation of sub-50 nm Si columns for light emission study

Harvey I. Liu, N.I. Maluf, R. F. W. Pease,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1992

93

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