Concepedia

Nassir Mojarad

NM

11

Publications

583

Citations

10

H-Index

2013

Active since

Affiliations

Paul Scherrer Institute(Current)

University of Basel

Swiss Nanoscience Institute

Nassir Mojarad is an author at Paul Scherrer Institute specializing in engineering, applied physics, and optical properties.

Top concepts

EngineeringApplied PhysicsOptical PropertiesPhysicsPhotonicsOptoelectronicsMaterial ScienceHealthBiophysicsMicroscopy

Publications per year

2013–2021

11

Publications

11

Beyond EUV lithography: a comparative study of efficient photoresists' performance

Nassir Mojarad, J. Gobrecht, Yasin Ekinci · Scientific Reports · 2015 · 142 citations · Full text

Engineering, Electron-beam Lithography, Microscopy +20

Interference lithography at EUV and soft X-ray wavelengths: Principles, methods, and applications

Nassir Mojarad, J. Gobrecht, Yasin Ekinci · Microelectronic Engineering · 2015 · 107 citations

Materials Science, Photonics, Soft X-ray Wavelengths +15

Single-digit-resolution nanopatterning with extreme ultraviolet light for the 2.5 nm technology node and beyond

Nassir Mojarad, Mohamad Hojeij, L. Wang et al. · Nanoscale · 2015 · 101 citations

Evaluation of EUV resist performance with interference lithography towards 11 nm half-pitch and beyond

Yasin Ekinci, Michaela Vockenhuber, Mohamad Hojeij et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 78 citations · Full text

Euv Resist Performance, Engineering, Electron-beam Lithography +17

Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths

Nassir Mojarad, Daniel Fan, J. Gobrecht et al. · Optics Letters · 2014 · 49 citations

Optical Materials, New Interference Lithography, Nano-optics +21

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