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Interference lithography at EUV and soft X-ray wavelengths: Principles, methods, and applications

Materials SciencePhotonicsSoft X-ray WavelengthsX-ray SpectroscopyInterference LithographyPhysicsEngineeringOptical PropertiesHealth SciencesElectron-beam LithographyApplied PhysicsX-ray TechnologyX-ray DiffractionBeam LithographySynchrotron RadiationOptoelectronicsX-ray OpticX-ray Imaging