Statistics
Publications
3
Citations
49
H-Index
3
Active since
2017
Affiliations
IBM Research - Austin(Current)
Cody Murray is an author at IBM Research - Austin specializing in living donor compatibility, defect characterization, and electron beam lithography.
Publications per year
2017–2023
3
3
Driving down defect density in composite EUV patterning film stacks
Luciana Meli, Karen Petrillo, Anuja De Silva et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 13 citations
Natural Sciences, Electrical Engineering, Manufacturing Engineering +17
Strategies for aggressive scaling of EUV multi-patterning to sub-20 nm features
Ashim Dutta, Jennifer Church, Joe Lee et al. · 2020 · 12 citations
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