Concepedia

R. F. Reihl

RF

5

Publications

96

Citations

5

H-Index

1979

Active since

Affiliations

General Electric (United States)(Current)

R. F. Reihl is an author at General Electric (United States) specializing in engineering, materials science, and surface science.

Top concepts

Publications per year

1979–1981

5

Publications

5

The effect of phosphorus ion implantation on molybdenum/silicon contacts

S. W. Chiang, T. P. Chow, R. F. Reihl et al. · Journal of Applied Physics · 1981 · 32 citations

, , +13

Induced interface interactions in Ti/Si systems by ion implantation

K. L. Wang, F. Bacon, R. F. Reihl · Journal of Vacuum Science and Technology · 1979 · 24 citations

, , +12

Oxidation of silicon by ion implantation and laser irradiation

S. W. Chiang, Y. S. Liu, R. F. Reihl · Applied Physics Letters · 1981 · 18 citations

, , +11

Interface modification of refractory metal–silicon structures by ion implantation

K. L. Wang, F. Bacon, R. F. Reihl · Journal of Vacuum Science and Technology · 1979 · 11 citations

, , +9

Refractory metal silicide formation by ion implantation

K.L. Wang, S. W. Chiang, F. Bacon et al. · Thin Solid Films · 1980 · 11 citations

, , +4

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