Roland Füßl

Recent developments and challenges of nanopositioning and nanomeasuring technology

Eberhard Manske, Gerd Jäger, Tino Hausotte et al. · Measurement Science and Technology · 2012 · 188 citations

Engineering, Manufacturing Engineering, Metrology +15

Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision

Eberhard Manske, Thomas Fröhlich, Roland Füßl et al. · Measurement Science and Technology · 2020 · 47 citations · Full text

Natural Sciences, Physics, Nanotechnology +14

A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements

Guido Straube, Juan Sebastian Fischer Calderón, Ingo Ortlepp et al. · Nanomanufacturing and Metrology · 2021 · 27 citations · Full text

Engineering, Electrical Engineering, Mechatronics Engineering +17

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Ingo Ortlepp, Thomas Fröhlich, Roland Füßl et al. · Nanomanufacturing and Metrology · 2021 · 24 citations · Full text

Engineering, Materials Engineering, Materials Science +13

Ongoing trends in precision metrology,particularly in nanopositioning and nanomeasuring technology

Eberhard Manske, Roland Füßl, Rostyslav Mastylo et al. · tm - Technisches Messen · 2015 · 17 citations

Engineering, Materials Science, Metrology +15