Ingo Ortlepp

Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision

Eberhard Manske, Thomas Fröhlich, Roland Füßl et al. · Measurement Science and Technology · 2020 · 46 citations · Full text

Frequency Metrology, Engineering, Microscopy +29

A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements

Guido Straube, Juan Sebastian Fischer Calderón, Ingo Ortlepp et al. · Nanomanufacturing and Metrology · 2021 · 24 citations · Full text

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Ingo Ortlepp, Thomas Fröhlich, Roland Füßl et al. · Nanomanufacturing and Metrology · 2021 · 21 citations · Full text

Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control

Ingo Ortlepp, Jaqueline Stauffenberg, Eberhard Manske · Sensors · 2021 · 13 citations · Full text

Engineering, Microscopy, Mechanical Engineering +19

Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm

Jaqueline Stauffenberg, Ingo Ortlepp, Johannes Belkner et al. · Applied Sciences · 2022 · 13 citations · Full text

Engineering, Measurement, Trajectory Deviation +22