Benoît Olbrechts

Planar double-gate SOI MOS devices: Fabrication by wafer bonding over pre-patterned cavities and electrical characterization

Tsung Ming Chung, Benoît Olbrechts, U. Södervall et al. · Solid-State Electronics · 2007 · 44 citations

Materials Science, Pre-patterned Cavities, Electrical Engineering +9

Nanowire‐Decorated Microscale Metallic Electrodes

Alexandru Vlad, M. Mátéfi-Tempfli, Vlad Antohe et al. · Small · 2008 · 37 citations

Electrical characterization of true Silicon-On-Nothing MOSFETs fabricated by Si layer transfer over a pre-etched cavity

Valeriya Kilchytska, Tsung Ming Chung, Benoît Olbrechts et al. · Solid-State Electronics · 2007 · 32 citations

Electrical Engineering, Engineering, Nanoelectronics +8

Effect of interfacial SiO2 thickness for low temperature O2 plasma activated wafer bonding

Benoît Olbrechts, Xuanxiong Zhang, Yannick Bertholet et al. · Microsystem Technologies · 2005 · 20 citations

Materials Science, Wafer Scale Processing, Engineering +8

Bulk and surface micromachined MEMS in thin film SOI technology

Jean‐Pierre Raskin, F. Iker, Nicolás André et al. · Electrochimica Acta · 2006 · 18 citations

Materials Science, Wafer Scale Processing, Engineering +8