24
Publications
941
Citations
17
H-Index
2002
Active since
Frank L. Palmieri is an author at Langley Research Center specializing in engineering, materials science, and 3d printing.
Top concepts
EngineeringMaterial Science3D PrintingApplied PhysicsMicrofabricationMechanical EngineeringMicroelectronicsElectronic PackagingPolymer ScienceChemical Engineering
Publications per year
2002–2021
24
24
Implementation of an imprint damascene process for interconnect fabrication
Gerard M. Schmid, M. D. Stewart, J. T. Wetzel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 82 citations
Dual Damascene Approach, Engineering, Electron-beam Lithography +18
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