Hirokazu Ohtoshi

Preparation of Polycrystalline Silicon by Hydrogen-Radical-Enhanced Chemical Vapor Deposition

Naoki Shibata, Kaichi Fukuda, Hirokazu Ohtoshi et al. · Japanese Journal of Applied Physics · 1987 · 74 citations

Materials Science, Materials Engineering, Epitaxial Growth +15

Spectroscopic study on the iodine molecule by a sequential three-photon excitation

Takashi Ishiwata, Hirokazu Ohtoshi, Mamoru Sakaki et al. · The Journal of Chemical Physics · 1984 · 62 citations

Engineering, Absorption Spectroscopy, Molecular Iodine +19

Growth of Amorphous and Crystalline Silicon by HR-CVD (Hydrogen Radical Enhanced CVD)

Naoki Shibata, Koichi Fukuda, Hirokazu Ohtoshi et al. · MRS Proceedings · 1987 · 60 citations

Materials Science, Crystalline Silicon, Engineering +6

The Role of Hydrogen Radicals in the Growth of a-Si and Related Alloys

Shunri Oda, Shun-ichi Ishihara, Naoki Shibata et al. · Japanese Journal of Applied Physics · 1986 · 37 citations

Sif N Radicals, Engineering, Chemistry +18

Photodissociation of Cl2SO at 248 and 193 nm in a molecular beam

Masahiro Kawasaki, Kazuo Kasatani, Hiroyasu Sato et al. · Chemical Physics · 1984 · 30 citations

Photochemistry, Physics, Optical Properties +9