1
Publications
212
Citations
1
H-Index
1994
Active since
Affiliations
Zhongqi Ma is an author at University of Illinois Urbana-Champaign specializing in materials engineering, applied physics, and engineering.
Top concepts
EngineeringApplied PhysicsNanoelectronicsOptoelectronicsMicroelectronicsMaterials EngineeringElectrical Engineering
Publications per year
1994–1994
1
1
Reactive ion etching of GaN using BCl3
Mao Lin, Zhaoyan Fan, Zhongqi Ma et al. · Applied Physics Letters · 1994 · 212 citations
Materials Engineering, Electrical Engineering, Engineering +13
Rows per page
1–1 of 1