Concepedia
Statistics
Publications
3
Citations
62
H-Index
Active since
2013
Affiliations
Université Grenoble Alpes(Current)
Centre National de la Recherche Scientifique
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Institut polytechnique de Grenoble
Laboratoire d'Électronique des Technologies de l'Information
P. Brichon is an author at Université Grenoble Alpes specializing in materials science, plasma etching, and silicon etching.
Publications per year
2013–2016
MD simulations of low energy Clx+ ions interaction with ultrathin silicon layers for advanced etch processes
P. Brichon, E. Despiau-Pujo, Olivier Joubert · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 29 citations
Natural Sciences, Materials Engineering, Materials Science +17
Key plasma parameters for nanometric precision etching of Si films in chlorine discharges
P. Brichon, E. Despiau-Pujo, O. Mourey et al. · Journal of Applied Physics · 2015 · 23 citations
Engineering, Materials Science, Physics +17
Roughness generation during Si etching in Cl2 pulsed plasma
O. Mourey, Camille Petit-Étienne, Gilles Cunge et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 10 citations
Natural Sciences, Materials Science, Physics +17
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