Mark A. Sobolewski

The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges

P. J. Hargis, K. E. Greenberg, Paul Miller et al. · Review of Scientific Instruments · 1994 · 330 citations · Full text

Electrical Engineering, Plasma Electronics, Engineering +11

Ion energy distributions and sheath voltages in a radio-frequency-biased, inductively coupled, high-density plasma reactor

Mark A. Sobolewski, James K. Olthoff, Yicheng Wang · Journal of Applied Physics · 1999 · 103 citations

Ground Sheath Voltage, Sheath Voltages, Engineering +17

Electrical characterization of radio-frequency discharges in the Gaseous Electronics Conference Reference Cell

Mark A. Sobolewski · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 97 citations

Electrical Engineering, Engineering, Measurement +12

Electrical characteristics of argon radio frequency glow discharges in an asymmetric cell

Mark A. Sobolewski · IEEE Transactions on Plasma Science · 1995 · 86 citations

Electrical Characteristics, Electrical Engineering, Plasma Electronics +11

The effects of radio-frequency bias on electron density in an inductively coupled plasma reactor

Mark A. Sobolewski, Jung‐Hyung Kim · Journal of Applied Physics · 2007 · 66 citations

Electron Density, Electrical Engineering, Plasma Electronics +13