Concepedia

Yicheng Wang

YW

Statistics

Publications

14

Citations

510

H-Index

11

Active since

1997

Affiliations

National Institute of Standards and Technology(Current)

Beijing Jiaotong University

Material Measurement Laboratory

Yicheng Wang is an author at National Institute of Standards and Technology specializing in engineering, physics, and electrical engineering.

Top concepts

EngineeringPhysicsElectrical EngineeringApplied PhysicsInstrumentationChemistryPlasma PhysicsPlasma ScienceNatural SciencesPlasma Simulation

Publications per year

1997–2016

14

Publications

14

Ion energy distributions and sheath voltages in a radio-frequency-biased, inductively coupled, high-density plasma reactor

Mark A. Sobolewski, James K. Olthoff, Yicheng Wang · Journal of Applied Physics · 1999 · 103 citations

Ground Sheath Voltage, Sheath Voltages, Engineering +17

Ion energy distributions in inductively coupled radio-frequency discharges in argon, nitrogen, oxygen, chlorine, and their mixtures

Yicheng Wang, James K. Olthoff · Journal of Applied Physics · 1999 · 70 citations

Electrical Engineering, Chemical Engineering, Ion Energy Distributions +13

Measurements and modeling of ion energy distributions in high-density, radio-frequency biased CF4 discharges

Mark A. Sobolewski, Yicheng Wang, A. N. Goyette · Journal of Applied Physics · 2002 · 62 citations

Engineering, Pure Cf4, Glow Discharge +18

Electron Interactions with CCl2F2

L. G. Christophorou, James K. Olthoff, Yicheng Wang · Journal of Physical and Chemical Reference Data · 1997 · 62 citations

Engineering, Computational Chemistry, Chemistry +18

Mass spectrometric measurement of molecular dissociation in inductively coupled plasmas

Yicheng Wang, R. J. Van Brunt, James K. Olthoff · Journal of Applied Physics · 1998 · 48 citations

Radio Frequency, Atomic Emission Spectroscopy, Chemistry +19

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