Concepedia

Michiaki Odagaki

MO

Statistics

Publications

2

Citations

111

H-Index

2

Active since

2002

Affiliations

Riso Kagaku (Japan)(Current)

Nagoya University

Michiaki Odagaki is an author at Riso Kagaku (Japan) specializing in etching processes, engineering, and microfabrication.

Publications per year

2002–2004

2

Publications

2

A model explaining mask-corner undercut phenomena in anisotropic silicon etching: a saddle point in the etching-rate diagram

Mitsuhiro Shikida, Ken-ichi Nanbara, Tohru Koizumi et al. · Sensors and Actuators A Physical · 2002 · 66 citations

, , +15

Non-photolithographic pattern transfer for fabricating arrayed three-dimensional microstructures by chemical anisotropic etching

Mitsuhiro Shikida, Michiaki Odagaki, Nobuo Todoroki et al. · Sensors and Actuators A Physical · 2004 · 45 citations

, , +14

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