Concepedia

Gen Tochitani

GT

Statistics

Publications

5

Citations

123

H-Index

5

Active since

1989

Affiliations

Hokkaido University(Current)

Sapporo Medical University

Gen Tochitani is an author at Hokkaido University specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceHydrogenThin FilmsSurface ScienceElectrical EngineeringPhysicsGrapheneChemistry

Publications per year

1989–1997

5

Publications

5

Deposition of silicon oxide films from TEOS by low frequency plasma chemical vapor deposition

Gen Tochitani, M. Shimozuma, Hiroaki Tagashira · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 43 citations

Materials Science, Electrical Engineering, Plasma Electronics +14

Optical emission diagnostics of H2+CH4 50-Hz–13.56-MHz plasmas for chemical vapor deposition

M. Shimozuma, Gen Tochitani, Hiroaki Tagashira · Journal of Applied Physics · 1991 · 36 citations · Full text

Engineering, Plasma Physics, H2+ch4 Plasma +17

Annealing Behavior of HF-Treated GaAs Capped with SiO<sub>2</sub> Films Prepared by 50-Hz Plasma-Assisted Chemical Vapor Deposition

Tamotsu Hashizume, Hideki Hasegawa, Gen Tochitani et al. · Japanese Journal of Applied Physics · 1992 · 21 citations

Materials Science, Semiconductors, Electrical Engineering +14

Hydrogenated amorphous carbon films deposited by low-frequency plasma chemical vapor deposition at room temperature

M. Shimozuma, Gen Tochitani, Hideo Ohno et al. · Journal of Applied Physics · 1989 · 13 citations

Engineering, Chemistry, Plasma Processing +16

Potential Oscillations in an Electronegative Plasma Driven by an Asymmetry RF Discharge

Yasunori Ohtsu, Gen Tochitani, Hiroharu Fujita · Japanese Journal of Applied Physics · 1997 · 10 citations

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