Concepedia

Yasunori Ohtsu

YO

Statistics

Publications

34

Citations

684

H-Index

16

Active since

1992

Affiliations

Saga University(Current)

National Institute of Advanced Industrial Science and Technology

Doshisha University

Alexandru Ioan Cuza University

Yasunori Ohtsu is an author at Saga University specializing in engineering, electrical engineering, and applied physics.

Top concepts

EngineeringElectrical EngineeringPlasma PhysicsApplied PhysicsPlasma ConfinementPhysicsPlasma SciencePlasma TheoryPulse PowerMaterial Science

Publications per year

1992–2022

34

Publications

34

CF<sub>3</sub>, CF<sub>2</sub>and CF Radical Measurements in RF CHF<sub>3</sub>Etching Plasma Using Infrared Diode Laser Absorption Spectroscopy

Koji Maruyama, Katsunori Ohkouchi Katsunori Ohkouchi, Yasunori Ohtsu et al. · Japanese Journal of Applied Physics · 1994 · 54 citations

Cf Radical Densities, Cf 2, Engineering +11

Observation of radio-frequency discharges at various driving frequencies

Yasunori Ohtsu, Yoshihiro Okuno, Hiroharu Fujita · Journal of Applied Physics · 1993 · 45 citations

Engineering, Glow Discharge, Plasma Physics +19

Observation of internal pulsed current flow through the ZnO specimen in the spark plasma sintering method

Tatsuya Misawa, Noboru Shikatani, Yuji Kawakami et al. · Journal of Materials Science · 2008 · 38 citations

Materials Science, Engineering, Spark Plasma +3

Capacitive radio frequency discharges with a single ring-shaped narrow trench of various depths to enhance the plasma density and lateral uniformity

Yasunori Ohtsu, Naoki Matsumoto, Julian Schulze et al. · Physics of Plasmas · 2016 · 37 citations

Electron Density, Electrical Engineering, Engineering +12

Production of high-density capacitive plasma by the effects of multihollow cathode discharge and high-secondary-electron emission

Yasunori Ohtsu, H. Fujita · Applied Physics Letters · 2008 · 33 citations

Materials Science, Electron Density, Electrical Engineering +14

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