Concepedia

Katsunori Ohkouchi Katsunori Ohkouchi

KO

Statistics

Publications

2

Citations

67

H-Index

2

Active since

1994

Affiliations

Nagoya University(Current)

Katsunori Ohkouchi Katsunori Ohkouchi is an author at Nagoya University specializing in chemistry, physics, and spectroscopy.

Top concepts

Publications per year

1994–1996

2

Publications

2

CF<sub>3</sub>, CF<sub>2</sub>and CF Radical Measurements in RF CHF<sub>3</sub>Etching Plasma Using Infrared Diode Laser Absorption Spectroscopy

Koji Maruyama, Katsunori Ohkouchi Katsunori Ohkouchi, Yasunori Ohtsu et al. · Japanese Journal of Applied Physics · 1994 · 54 citations

, , +11

Kinetics of CF<sub>X</sub> (x=1 –3) Radicals and Electrons in RF CF<sub>4</sub>-H<sub>2</sub>, CHF<sub>3</sub>-H<sub>2</sub> and CHF<sub>3</sub>-O<sub>2</sub> Plasmas

Koji Maruyama, Katsunori Ohkouchi Katsunori Ohkouchi, Toshio Goto · Japanese Journal of Applied Physics · 1996 · 13 citations

, , +19

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