Concepedia

Seok-Hyun Lee

SL

Statistics

Publications

2

Citations

83

H-Index

2

Active since

1996

Affiliations

Seoul National University(Current)

Seok-Hyun Lee is an author at Seoul National University specializing in spectroscopy, optical emission spectroscopy, and high-temperature plasmas.

Publications per year

1996–1996

2

Publications

2

Mechanism of selective SiO2/Si etching with fluorocarbon gases (CF4, C4F8) and hydrogen mixture in electron cyclotron resonance plasma etching system

Hyun-Ho Doh, Junghun Kim, Seok-Hyun Lee et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 47 citations

, , +14

Effect of hydrogen addition to fluorocarbon gases (CF4, C4F8) in selective SiO2/Si etching by electron cyclotron resonance plasma

Hyun-Ho Doh, Junghun Kim, Ki‐Woong Whang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 36 citations

, , +14

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