Tim Fühner

A physically based model for the spatial and temporal evolution of self-interstitial agglomerates in ion-implanted silicon

C.J. Ortiz, P. Pichler, Tim Fühner et al. · Journal of Applied Physics · 2004 · 74 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Dr.LiTHO: a development and research lithography simulator

Tim Fühner, Thomas Schnattinger, Gheorghe Ardelean et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 59 citations

Computing, Computer Engineering, Computer Science +11

Use of genetic algorithms for the development and optimization of crystal growth processes

Tim Fühner, Thomas Jung · Journal of Crystal Growth · 2004 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +14

Improved mask and source representations for automatic optimization of lithographic process conditions using a genetic algorithm

Tim Fühner, Andreas Erdmann · Optical Microlithography XVIII · 2005 · 37 citations

Architecture, Manufacturing Engineering, Design Optimization +15

Optical and EUV projection lithography: A computational view

Andreas Erdmann, Tim Fühner, Peter Evanschitzky et al. · Microelectronic Engineering · 2014 · 37 citations

Engineering, Manufacturing Engineering, Optics +10