M. F. Panov

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 94 citations · Full text

Engineering, Thin Film Process Technology, Chemistry +17

Surface Functionality Features of Porous Silicon Prepared and Treated in Different Conditions

Yu. M. Spivak, S. V. Mjakin, M. F. Panov et al. · Journal of Nanomaterials · 2016 · 52 citations · Full text

Engineering, Nanoporous Material, Current Density +20

Features of the formation of nanoporous membranes based on alumina from foil and new fields of applications

Viktor A. Lifshits, L. B. Matyushkin, M. F. Panov et al. · Glass Physics and Chemistry · 2017 · 15 citations

Investigation of the Hardness and Young’s Modulus in Thin Near-Surface Layers of Silicon Carbide from the Si- and C-Faces by Nanoindentation

A. N. Gorlyak, A. O. Lebedev, V. V. Luchinin et al. · Technical Physics Letters · 2020 · 12 citations

Determination of the alumina membrane geometrical parameters using its optical spectra

L. B. Matyushkin, M. F. Panov · Micro & Nano Letters · 2016 · 11 citations

Engineering, Porous Membrane, Absorption Spectroscopy +18