Concepedia
2
Publications
29
Citations
H-Index
2001
Active since
Affiliations
National Chiayi University(Current)
National Yang Ming Chiao Tung University
National Chi Nan University
National Cheng Kung University
C. W. Liu is an author at National Chiayi University specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicrofabricationMaterials Engineering
Publications per year
2001–2001
Characterization and reliability of low dielectric constant fluorosilicate glass and silicon rich oxide process for deep sub-micron device application
Yi-Lung Cheng, Yuh‐Lin Wang, C. W. Liu et al. · Thin Solid Films · 2001 · 18 citations
Materials Science, Glass-ceramic, Engineering +5
Integration of MOCVD titanium nitride with collimated titanium and ion metal plasma titanium for 0.18-μm logic process
J.K. Lan, Yuh‐Lin Wang, Kai‐Ming Lo et al. · Thin Solid Films · 2001 · 11 citations
Materials Engineering, Materials Science, Ion Implantation +6
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