Li Yan Siow

NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector

Doris K. T. Ng, Chong Pei Ho, Linfang Xu et al. · Sensors and Actuators B Chemical · 2021 · 62 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride

Doris K. T. Ng, Tan‐Tan Zhang, Li Yan Siow et al. · Applied Physics Letters · 2020 · 29 citations · Full text

Engineering, Materials Engineering, Materials Science +17

AlN wideband energy harvesters with wafer-level vacuum packaging utilizing three-wafer bonding

Nan Wang, Chengliang Sun, Li Yan Siow et al. · 2017 · 17 citations

Engineering, Electrical Engineering, Materials Science +17

A Miniaturization Strategy for Harvesting Vibration Energy Utilizing Helmholtz Resonance and Vortex Shedding Effect

Chengliang Sun, Xiaojing Mu, Li Yan Siow et al. · IEEE Electron Device Letters · 2014 · 14 citations

Engineering, Mechanical Engineering, Energy Systems +14

Double side redistribution layer process on embedded wafer level package for package on package (PoP) applications

Soon Wee Ho, Fernardez Moses Daniel, Li Yan Siow et al. · 2010 · 14 citations

Engineering, Materials Engineering, Materials Science +17