Concepedia

Hajime Aoyama Hajime Aoyama

HA

Statistics

Publications

1

Citations

26

H-Index

1

Active since

1994

Affiliations

Fujitsu (Japan)(Current)

Hajime Aoyama Hajime Aoyama is an author at Fujitsu (Japan) specializing in etching processes, wet etching, and silicon nanostructures.

Publications per year

1994–1994

1

Publications

1

Isolated Nanometer-Size Si Dot Arrays Fabricated Using Electron-Beam Lithography, Reactive Ion Etching, and Wet Etching in NH<sub>4</sub>OH/H<sub>2</sub>O<sub>2</sub>/H<sub>2</sub>O

Anri Nakajima, Hajime Aoyama Hajime Aoyama, Kazuo Kawamura · Japanese Journal of Applied Physics · 1994 · 26 citations

, , +17

1–1 of 1