D. I. Slovetsky

Electron impact induced electronic excitation and molecular dissociation

L.S. Polak, D. I. Slovetsky · International Journal for Radiation Physics and Chemistry · 1976 · 63 citations

Engineering, Physics, Electron Spectroscopy +6

Experimental and theoretical study of the CF₄DC glow discharge positive column

Vladimir Volynets, A. V. Lukyanova, A. T. Rakhimov et al. · Journal of Physics D Applied Physics · 1993 · 32 citations

Discharge Positive Column, Electrical Engineering, Reduced Electric Field +9

Kinetics and mechanisms of chemical reactions in nonequilibrium-plasma etching of silicon and silicon compounds

G.Y. Vinogradov, P.I. Nevzorov, LS Polak et al. · Vacuum · 1982 · 27 citations

Engineering, Physics, Microfabrication +13

The influence of anisotropy and non-locality of the electron distribution function as well as non-equilibrium ion diffusion on the electrodynamics of DC discharge at low pressure

Vladimir V. Ivanov, A. M. Popov, A. T. Rakhimov et al. · Journal of Physics D Applied Physics · 1997 · 17 citations

Non-equilibrium Ion Diffusion, Axial Electric Field, Electrical Engineering +12

Vibrationally excited molecules and mechanisms of chemical and physical processes in non-equilibrium plasmas

P. A. Sergeev, D. I. Slovetsky · Chemical Physics · 1983 · 16 citations

Excited State Property, Engineering, Non-equilibrium Plasmas +11