Concepedia

LS Polak

LP

1

Publications

27

Citations

1

H-Index

1982

Active since

Affiliations

A.V. Topchiev Institute of Petrochemical Synthesis(Current)

LS Polak is an author at A.V. Topchiev Institute of Petrochemical Synthesis specializing in microfabrication, natural sciences, and applied physics.

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Publications per year

1982–1982

1

Publications

1

Kinetics and mechanisms of chemical reactions in nonequilibrium-plasma etching of silicon and silicon compounds

G.Y. Vinogradov, P.I. Nevzorov, LS Polak et al. · Vacuum · 1982 · 27 citations

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