Arie J. den Boef

Optical wafer metrology sensors for process-robust CD and overlay control in semiconductor device manufacturing

Arie J. den Boef · Surface Topography Metrology and Properties · 2016 · 119 citations

Engineering, Manufacturing Engineering, Metrology +16

The influence of lateral forces in scanning force microscopy

Arie J. den Boef · Review of Scientific Instruments · 1991 · 63 citations

Engineering, Mechanical Engineering, Biomedical Imaging +15

Novel diffraction-based spectroscopic method for overlay metrology

Weidong Yang, R. Lowe-Webb, Silvio Rabello et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 47 citations

Engineering, Manufacturing Engineering, Materials Science +16

Two-wavelength scanning spot interferometer using single-frequency diode lasers

Arie J. den Boef · Applied Optics · 1988 · 43 citations

Engineering, Electrical Engineering, Optics +16

Preparation of magnetic tips for a scanning force microscope

Arie J. den Boef · Applied Physics Letters · 1990 · 43 citations

Natural Sciences, Materials Science, Physics +16