Concepedia

M. Essig

ME

Statistics

Publications

2

Citations

37

H-Index

2

Active since

1977

Affiliations

University of Kaiserslautern(Current)

M. Essig is an author at University of Kaiserslautern specializing in electron beam physics, physics, and materials science.

Publications per year

1977–1986

2

Publications

2

Energy distribution of post-accelerated electrons field-emitted from carbon fibres

Hermann Heinrich, M. Essig, J. Geiger · Applied Physics A · 1977 · 25 citations

, , +11

Critical Koehler illumination for shaped beam lithography

M. Essig, H. C. Pfeiffer · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 12 citations

, , +11

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