Statistics
Publications
1
Citations
51
H-Index
1
Active since
1994
Affiliations
Tt Sheng is an author at Varian Medical Systems (United States) specializing in applied physics, electrical engineering, and engineering.
Publications per year
1994–1994
1
1
Characteristics of a plasma doping system for semiconductor device fabrication
Tt Sheng, Susan B. Felch, C. B. Cooper · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 51 citations
Semiconductors, Semiconductor Devices, Electrical Engineering +13
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