K. Koshelev - Concepedia

Author

K. Koshelev

Also Known As

K. Koshelev, Kirill Koshelev, de Bruijn, R.

Publications

150

Citations

H-Index

Concepts

All Affiliations

K. Koshelev is an author at National Institute for Nanotechnology specializing in engineering, applied physics, and materials characterization.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	139
2	Applied Physics	4	4	139
3	Materials Science	4	4	139
4	Chemistry	2	2	52
5	Materials Engineering	2	2	52

K. Koshelev

Publications

139

Citations

H-Index

Page 1

	Year	Citations
Comparison between ZEP and PMMA resists for nanoscale electron beam lithography experimentally and by numerical modeling K. Koshelev, Mohammad Mohammad, Taras Fito, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena EngineeringElectron-beam LithographyPmma ResistsElectron DiffractionElectron Optic	2011	48
Simulation of electron beam lithography of nanostructures Maria Stepanova, Taras Fito, Z. Szabó, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena EngineeringElectron-beam LithographyMicroscopyMaterial SimulationPolymer Nanocomposites	2010	39
Study of Development Processes for ZEP-520 as a High-Resolution Positive and Negative Tone Electron Beam Lithography Resist Mohammad Mohammad, K. Koshelev, Taras Fito, Japanese Journal of Applied Physics EngineeringElectron-beam LithographyHigh-resolution PositiveChemistryElectron Optic	2012	30
Study of Development Processes for ZEP-520 as a High-Resolution Positive and Negative Tone Electron Beam Lithography Resist Mohammad Mohammad, K. Koshelev, Taras Fito, Japanese Journal of Applied Physics EngineeringElectron-beam LithographyHigh-resolution PositiveChemistryElectron Optic	2012	22

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