Concepedia

K. Koshelev

KK

Statistics

Publications

4

Citations

140

H-Index

4

Active since

2010

Affiliations

National Institute for Nanotechnology(Current)

University of Alberta

K. Koshelev is an author at National Institute for Nanotechnology specializing in electron beam lithography, materials engineering, and materials science.

Publications per year

2010–2012

4

Publications

4

Comparison between ZEP and PMMA resists for nanoscale electron beam lithography experimentally and by numerical modeling

K. Koshelev, Mohammad Mohammad, Taras Fito et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 49 citations

, , +11

Simulation of electron beam lithography of nanostructures

Maria Stepanova, Taras Fito, Z. Szabó et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 39 citations

, , +17

Study of Development Processes for ZEP-520 as a High-Resolution Positive and Negative Tone Electron Beam Lithography Resist

Mohammad Mohammad, K. Koshelev, Taras Fito et al. · Japanese Journal of Applied Physics · 2012 · 30 citations

, , +13

Study of Development Processes for ZEP-520 as a High-Resolution Positive and Negative Tone Electron Beam Lithography Resist

Mohammad Mohammad, K. Koshelev, Taras Fito et al. · Japanese Journal of Applied Physics · 2012 · 22 citations

, , +13

1–4 of 4