Jochen Rinderknecht

Nano-Raman spectroscopy with metallized atomic force microscopy tips on strained silicon structures

Liang Zhu, Carsten Georgi, M. Hecker et al. · Journal of Applied Physics · 2007 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +17

Imaging and strain analysis of nano-scale SiGe structures by tip-enhanced Raman spectroscopy

Péter Hermann, M. Hecker, Dmytro Chumakov et al. · Ultramicroscopy · 2011 · 36 citations

Natural Sciences, Materials Engineering, Materials Science +16

Analytics and Metrology of Strained Silicon Structures by Raman and Nano-Raman Spectroscopy

M. Hecker, Liang Zhu, Carsten Georgi et al. · AIP conference proceedings · 2007 · 24 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Tuning nickel silicide properties using a lamp based RTA, a heat conduction based RTA or a furnace anneal

S. Waidmann, Volker Kahlert, C. Streck et al. · Microelectronic Engineering · 2006 · 11 citations

Engineering, Materials Engineering, Materials Science +10

Effects of patterning induced stress relaxation in strained SOI/SiGe layers and substrate

Péter Hermann, M. Hecker, Fabian Renn et al. · Journal of Applied Physics · 2011 · 11 citations

Engineering, Electrical Engineering, Materials Science +17