Statistics
Publications
1
Citations
24
H-Index
1
Active since
1996
Affiliations
Mapper Lithography (Netherlands)(Current)
Frans Klaassen is an author at Mapper Lithography (Netherlands) specializing in throughput improvement, semiconductor devices, and industrial lithography.
Publications per year
1996–1996
1
1
<title>Step-and-scan and step-and-repeat: a technology comparison</title>
Martin A. van den Brink, Hans Jasper, Steve D. Slonaker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 24 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +10
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