Concepedia

A. Shugard

AS

Statistics

Publications

4

Citations

139

H-Index

4

Active since

1987

Affiliations

AT&T (United States)(Current)

A. Shugard is an author at AT&T (United States) specializing in natural sciences, materials science, and polymer materials.

Publications per year

1987–1989

4

Publications

4

Nitrobenzyl ester chemistry for polymer processes involving chemical amplification

F. M. Houlihan, A. Shugard, Robert Gooden et al. · Macromolecules · 1988 · 72 citations

Natural Sciences, Chemistry, Materials Science +11

Poly(t‐BOC‐styrene sulfone)‐based chemically amplified resists for deep‐UV lithography

R. G. Tarascon, Elsa Reichmanis, Francis M. Houlihan et al. · Polymer Engineering and Science · 1989 · 28 citations

Natural Sciences, Chemistry, Materials Science +10

Experimental tests of the steady-state model for oxygen reactive ion etching of silicon-containing polymers

C. W. Jurgensen, A. Shugard, Nancy Dudash et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +17

The evaluation of positive acting resists for lithography at 248 nm

Thomas Wolf, R. L. Hartless, A. Shugard et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +12

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