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Eric M. Apelgren

EM

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Publications

1

Citations

10

H-Index

1

Active since

2003

Affiliations

ASML (Netherlands)(Current)

Eric M. Apelgren is an author at ASML (Netherlands) specializing in applied physics, microelectronics, and ophthalmology.

Top concepts

Publications per year

2003–2003

1

Publications

1

Study of the influence of substrate topography on the focusing performance of advanced lithography scanners

Bruno M. La Fontaine, Jan Hauschild, Mircea Dusa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 10 citations

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