Q.F. Wang is an author at IMEC specializing in microfabrication, microelectronics, and chemical kinetics.
Top concepts
ChemistryEngineeringSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationChemical KineticsChemical EngineeringMaterials EngineeringEnvironmental Engineering
Publications per year
2002–2002
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New CoSi/sub 2/ SALICIDE technology for 0.1 μm processes and below
Q.F. Wang, Karen Maex, Stefan Kubicek et al. · 2002 · 11 citations
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