Statistics
Publications
3
Citations
71
H-Index
3
Active since
1978
Affiliations
Fujitsu (Japan)(Current)
Tsuguo Inada is an author at Fujitsu (Japan) specializing in semiconductor devices, engineering, and ion implantation.
Publications per year
1978–1983
3
3
Channeled-ion implantation of group-III and group-V ions into silicon
T. Furuya, H. Nishi, Tsuguo Inada et al. · Journal of Applied Physics · 1978 · 29 citations
Uniform doping of channeled-ion implantation
H. Nishi, Tsuguo Inada, T. Sakurai et al. · Journal of Applied Physics · 1978 · 26 citations
Engineering, Electrical Engineering, Electronic Materials +8
Implantation into an AlGaAs/GaAs Heterostructure
H. Nishi, Tsuguo Inada, Junji Saito et al. · Japanese Journal of Applied Physics · 1983 · 16 citations
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