Concepedia

Rami Ljazouli

RL

Statistics

Publications

3

Citations

100

H-Index

3

Active since

2012

Affiliations

Groupe de Recherches sur l'Energétique des Milieux Ionisés(Current)

Université d'Orléans

Centre National de la Recherche Scientifique

Lomonosov Moscow State University

IMEC

Rami Ljazouli is an author at Groupe de Recherches sur l'Energétique des Milieux Ionisés specializing in materials engineering, materials science, and etching processes.

Publications per year

2012–2015

3

Publications

3

Low Damage Cryogenic Etching of Porous Organosilicate Low-k Materials Using SF<sub>6</sub>/O<sub>2</sub>/SiF<sub>4</sub>

Liping Zhang, Rami Ljazouli, Philippe Lefaucheux et al. · ECS Journal of Solid State Science and Technology · 2013 · 41 citations · Full text

, , +15

Damage Free Cryogenic Etching of a Porous Organosilica Ultralow-k Film

L. Zhang, Rami Ljazouli, Philippe Lefaucheux et al. · ECS Solid State Letters · 2012 · 36 citations

, , +16

Single and multilayered materials processing by argon ion beam etching: study of ion angle incidence and defect formation

Nicolas Gosset, Mohamed Boufnichel, Emilie Bahette et al. · Journal of Micromechanics and Microengineering · 2015 · 23 citations

, , +15

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