Concepedia

L. Zhang

LZ

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Publications

2

Citations

65

H-Index

2

Active since

2012

Affiliations

IMEC(Current)

KU Leuven

L. Zhang is an author at IMEC specializing in plasma-induced damage, materials chemistry, and materials engineering.

Publications per year

2012–2015

2

Publications

2

Damage Free Cryogenic Etching of a Porous Organosilica Ultralow-k Film

L. Zhang, Rami Ljazouli, Philippe Lefaucheux et al. · ECS Solid State Letters · 2012 · 36 citations

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Damage free integration of ultralow-k dielectrics by template replacement approach

L. Zhang, Jean‐François de Marneffe, N. Heylen et al. · Applied Physics Letters · 2015 · 29 citations · Full text

, , +17

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