Sherjang Singh

SiC-C fiber electrode for biological sensing

Sherjang Singh, Relva C. Buchanan · Materials Science and Engineering C · 2006 · 26 citations

Engineering, Bioelectronics, Electrophysiology +4

Impact of MegaSonic process conditions on PRE and sub-resolution assist feature damage

Stefan Helbig, Sabine Urban, Elizabeth G. Klein et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 22 citations

Engineering, Nondestructive Testing, Sraf Patterns +7

Study on surface integrity in photomask resist strip and final cleaning processes

Sherjang Singh, Stefan Helbig, Peter Dress et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 14 citations

Optical Materials, Engineering, Surface Integrity +21

Techniques for removal of contamination from EUVL mask without surface damage

Sherjang Singh, Ssuwei Chen, Tobias Wähler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 13 citations

Materials Science, Optical Materials, Engineering +12

Effective EUVL mask cleaning technology solutions for mask manufacturing and in-fab mask maintenance

Uwe Dietze, Peter Dress, Tobias Waehler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 11 citations

Engineering, Electron-beam Lithography, Mask Manufacturing +16