Statistics
Publications
1
Citations
11
H-Index
1
Active since
2011
Affiliations
IMEC(Current)
Tobias Waehler is an author at IMEC specializing in microfabrication, engineering, and electronic packaging.
Publications per year
2011–2011
1
1
Effective EUVL mask cleaning technology solutions for mask manufacturing and in-fab mask maintenance
Uwe Dietze, Peter Dress, Tobias Waehler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 11 citations
Engineering, Electron-beam Lithography, Mask Manufacturing +16
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