Concepedia

Stefan Helbig

SH

Statistics

Publications

2

Citations

36

H-Index

2

Active since

2008

Affiliations

Advanced Mask Technology Center (Germany)(Current)

Stefan Helbig is an author at Advanced Mask Technology Center (Germany) specializing in engineering, ultrasound, and mechanical engineering.

Top concepts

Publications per year

2008–2009

2

Publications

2

Impact of MegaSonic process conditions on PRE and sub-resolution assist feature damage

Stefan Helbig, Sabine Urban, Elizabeth G. Klein et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 22 citations

, , +7

Study on surface integrity in photomask resist strip and final cleaning processes

Sherjang Singh, Stefan Helbig, Peter Dress et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 14 citations

, , +21

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