Statistics
Publications
11
Citations
964
H-Index
11
Active since
1960
Affiliations
Weizmann Institute of Science(Current)
Boris Sherman is an author at Weizmann Institute of Science specializing in physics, natural sciences, and atom-field interactions.
Publications per year
1960–2011
11
11
A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM
Alok Vaid, Bin Bin Yan, Yun Tao Jiang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 65 citations
Engineering, Electrical Engineering, Manufacturing Engineering +16
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